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Conference contributions
3D sequential CMOS top tier devices demonstration using a low temperature Smart Cu (TM) Si layer transfer
Publication:
3D sequential CMOS top tier devices demonstration using a low temperature Smart Cu (TM) Si layer transfer
Date
2021
Proceedings Paper
https://doi.org/10.1109/SNW51795.2021.00025
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Besnard, Guillaume
;
Radu, Ionut
;
Vandooren, Anne
;
Wu, Zhicheng
;
Franco, Jacopo
;
Li, Waikin
;
Arimura, Hiroaki
;
Mannaert, Geert
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
Journal
na
Abstract
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1955
since deposited on 2022-03-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1955
since deposited on 2022-03-16
Acq. date: 2025-10-23
Citations