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Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
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Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
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Date
2011
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Favia, Paola
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Verheyen, Peter
;
Klenov, Dmitri
;
Bender, Hugo
Journal
Journal of the Electrochemical Society
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1961
since deposited on 2021-10-19
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last week
Acq. date: 2025-12-11
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Metrics
Views
1961
since deposited on 2021-10-19
2
last month
2
last week
Acq. date: 2025-12-11
Citations