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Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
Publication:
Nanobeam dffraction: technique evaluation and strain measurement on complementary metal oxide semiconductor devices
Date
2011
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Favia, Paola
;
Bargallo Gonzalez, Mireia
;
Simoen, Eddy
;
Verheyen, Peter
;
Klenov, Dmitri
;
Bender, Hugo
Journal
Journal of the Electrochemical Society
Abstract
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1957
since deposited on 2021-10-19
433
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Acq. date: 2025-10-24
Citations
Metrics
Views
1957
since deposited on 2021-10-19
433
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations