Processing technologies for advanced Ge devices

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Author(s)

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Hikavyy, Andriy

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Witters, Liesbeth

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Schulze, Andreas

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Arimura, Hiroaki

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Porret, Clément

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Wormington, Matthew

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Richard, Olivier

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Horiguchi, Naoto

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Collaert, Nadine

Journal

ECS Journal of Solid State Science and Technology

Metrics

1989 since deposited on 2021-10-24

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Acq. date: 2025-10-24