Publication:

Processing technologies for advanced Ge devices

Date

2017
Journal article
https://doi.org/10.1149/2.0301612jss
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dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorSchulze, Andreas
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCott, Daire
dc.contributor.authorMitard, Jerome
dc.contributor.authorPorret, Clément
dc.contributor.authorMertens, Hans
dc.contributor.authorRyan, Paul
dc.contributor.authorWall, John
dc.contributor.authorMatney, Kevin
dc.contributor.authorWormington, Matthew
dc.contributor.authorFavia, Paola
dc.contributor.authorRichard, Olivier
dc.contributor.authorThean, Aaron
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.accessioned2021-10-24T08:14:18Z
dc.date.available2021-10-24T08:14:18Z
dc.date.issued2017
dc.identifier.doi10.1149/2.0301612jss
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28854
dc.identifier.urlhttp://jss.ecsdl.org/content/6/1/P14.abstract
dc.source.beginpage14
dc.source.endpage20
dc.source.issue1
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume6
dc.title

Processing technologies for advanced Ge devices

dc.typeJournal article
dspace.entity.typePublication
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