Publication:
Dry etch of Yb-doped poly-Si gates for low Vt FUSI devices
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1984 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-09
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Metrics
Views
1984 since deposited on 2021-10-16
1last month
Acq. date: 2026-01-09
Citations