Publication:

The need for LWR metrology standardization: the imec roughness protocol

Date

2018
Proceedings Paper
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Author(s)

Lorusso, Gian  
;
Sutani, Takeyoshi
;
Rutigliani, Vito
;
Van Roey, Frieda  
;
Moussa, Alain  
;
Charley, Anne-Laure  
;
Mack, Chris
;
Naulleau, Patrick
;
Constantoudis, Vassilios
;
Ikota, Masami
;
Ishimoto, Toru
;
Koshihara, S

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