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The need for LWR metrology standardization: the imec roughness protocol
Publication:
The need for LWR metrology standardization: the imec roughness protocol
Date
2018
Proceedings Paper
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39777.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lorusso, Gian
;
Sutani, Takeyoshi
;
Rutigliani, Vito
;
Van Roey, Frieda
;
Moussa, Alain
;
Charley, Anne-Laure
;
Mack, Chris
;
Naulleau, Patrick
;
Constantoudis, Vassilios
;
Ikota, Masami
;
Ishimoto, Toru
;
Koshihara, S
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1912
since deposited on 2021-10-25
Acq. date: 2025-10-23
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Downloads
1
since deposited on 2021-10-25
Acq. date: 2025-10-23
Views
1912
since deposited on 2021-10-25
Acq. date: 2025-10-23
Citations