Publication:
Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1920 since deposited on 2021-10-20
Acq. date: 2025-12-08
Citations
Metrics
Views
1920 since deposited on 2021-10-20
Acq. date: 2025-12-08
Citations