Publication:
Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
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1921 since deposited on 2021-10-20
1last month
Acq. date: 2026-04-06
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Statistics
Views
1921 since deposited on 2021-10-20
1last month
Acq. date: 2026-04-06
Citations