Publication:
Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films
Date
| dc.contributor.author | Vanstreels, Kris | |
| dc.contributor.author | Wu, Chen | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Martini, Roberto | |
| dc.contributor.author | Schneider, Dieter | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Vanstreels, Kris | |
| dc.contributor.imecauthor | Wu, Chen | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.orcidimec | Vanstreels, Kris::0000-0002-4420-0966 | |
| dc.contributor.orcidimec | Wu, Chen::0000-0002-4636-8842 | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-20T18:07:19Z | |
| dc.date.available | 2021-10-20T18:07:19Z | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21752 | |
| dc.source.beginpage | O3-01 | |
| dc.source.conference | Materials for Advanced Metallization - MAM | |
| dc.source.conferencedate | 11/03/2012 | |
| dc.source.conferencelocation | Grenoble France | |
| dc.title | Effect of porosity on the mechanical and fracture properties of advanced PECVD Ultralow-k SiCOH films | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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