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Challenges in patterning 45nm node multiple-gate devices and SRAM cells
Publication:
Challenges in patterning 45nm node multiple-gate devices and SRAM cells
Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ercken, Monique
;
Delvaux, Christie
;
Baerts, Christina
;
Locorotondo, Sabrina
;
Degroote, Bart
;
Wiaux, Vincent
;
Nackaerts, Axel
;
Rooyackers, Rita
;
Verhaegen, Staf
;
Pollentier, Ivan
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1937
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations
Metrics
Views
1937
since deposited on 2021-10-15
Acq. date: 2025-10-23
Citations