Publication:

Challenges in patterning 45nm node multiple-gate devices and SRAM cells

Date

2004
Proceedings Paper
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dc.contributor.authorErcken, Monique
dc.contributor.authorDelvaux, Christie
dc.contributor.authorBaerts, Christina
dc.contributor.authorLocorotondo, Sabrina
dc.contributor.authorDegroote, Bart
dc.contributor.authorWiaux, Vincent
dc.contributor.authorNackaerts, Axel
dc.contributor.authorRooyackers, Rita
dc.contributor.authorVerhaegen, Staf
dc.contributor.authorPollentier, Ivan
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorDelvaux, Christie
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorLocorotondo, Sabrina
dc.contributor.imecauthorWiaux, Vincent
dc.contributor.imecauthorPollentier, Ivan
dc.contributor.orcidimecPollentier, Ivan::0000-0002-4266-6500
dc.date.accessioned2021-10-15T13:21:43Z
dc.date.available2021-10-15T13:21:43Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8887
dc.source.conferenceProceedings 41st Interface Symposium
dc.source.conferencedate26/09/2004
dc.source.conferencelocationTempe, AZ USA
dc.title

Challenges in patterning 45nm node multiple-gate devices and SRAM cells

dc.typeProceedings paper
dspace.entity.typePublication
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