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Metal inserted poly-Si (MIPS) and FUSI dual metal (TaN and NiSi) CMOS integration
Publication:
Metal inserted poly-Si (MIPS) and FUSI dual metal (TaN and NiSi) CMOS integration
Date
2007-04
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Singanamalla, Raghunath
;
Van Dal, Mark
;
Demand, Marc
;
Shamiryan, Denis
;
Beckx, Stephan
;
Jaenen, Patrick
;
Locorotondo, Sabrina
;
Yu, HongYu
;
Hooker, Jacob
;
Kubicek, Stefan
;
De Meyer, Kristin
;
Biesemans, Serge
;
Juffermans, Casper
;
Lander, Rob
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1885
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1885
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations