Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Dhayalan, Sathish Kumar; Nuytten, Thomas; Pourtois, Geoffrey; Simoen, Eddy; Pezzoli, Fabio; Bonera, Emiliano; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Vandervorst, Wilfried

doi:10.1149/2.0181903jss

Publication:

Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Date

2019

Journal article

https://doi.org/10.1149/2.0181903jss

Simple item page Full metadata Statistics

Files

33668.pdf 995.46 KB

Author(s)

Dhayalan, Sathish Kumar

;

;

;

;

;

;

;

;

;

;

Vandervorst, Wilfried

Journal

ECS Journal of Solid State Science and Technology

Statistics

1 since deposited on 2021-10-27

Acq. date: 2026-08-05

1930 since deposited on 2021-10-27

2last month

2last week

Acq. date: 2026-08-05

Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations