Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Dhayalan, Sathish Kumar; Nuytten, Thomas; Pourtois, Geoffrey; Simoen, Eddy; Pezzoli, Fabio; Bonera, Emiliano; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Vandervorst, Wilfried

doi:10.1149/2.0181903jss

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Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

Date

2019

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https://doi.org/10.1149/2.0181903jss

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Dhayalan, Sathish Kumar

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Vandervorst, Wilfried

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ECS Journal of Solid State Science and Technology

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Insights into the C distribution in Si:C/Si:C:P and the annealing behavior of Si:C layers

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