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Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
Publication:
Demonstration of Ni fully GermanoSilicide as a pFET gate electrode candidate on HfSiON
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Yu, HongYu
;
Singanamalla, Raghunath
;
Opsomer, Karl
;
Augendre, Emmanuel
;
Simoen, Eddy
;
Kittl, Jorge
;
Kubicek, Stefan
;
Severi, Simone
;
Shi, Xiaoping
;
Brus, Stephan
;
Zhao, Chao
;
de Marneffe, Jean-Francois
;
Locorotondo, Sabrina
;
Shamiryan, Denis
;
Van Dal, Mark
;
Veloso, Anabela
;
Lauwers, Anne
;
Niwa, Masaaki
;
Maex, Karen
;
De Meyer, Kristin
;
Absil, Philippe
;
Jurczak, Gosia
;
Biesemans, Serge
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1975
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations
Metrics
Views
1975
since deposited on 2021-10-16
Acq. date: 2025-10-22
Citations