Publication:

Forksheet FETs for Advanced CMOS Scaling: Forksheet-Nanosheet Co-Integration and Dual Work Function Metal Gates at 17nm N-P Space

Date

2021
Proceedings Paper
Simple item page Full metadata Statistics
 
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0002-8201-075X
cris.virtual.orcid0000-0001-6328-7633
cris.virtual.orcid0009-0003-1267-5355
cris.virtual.orcid0009-0008-7831-564X
cris.virtual.orcid0000-0002-2737-8391
cris.virtual.orcid0000-0003-0333-376X
cris.virtual.orcid0009-0008-0186-6101
cris.virtual.orcid0000-0002-5376-2119
cris.virtual.orcid0000-0001-5941-0563
cris.virtual.orcid0000-0003-1057-8140
cris.virtual.orcid0000-0002-5195-9241
cris.virtual.orcid0000-0001-5036-0491
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0001-8938-9750
cris.virtual.orcid0000-0002-8615-3272
cris.virtual.orcid0000-0002-6619-1327
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid0000-0003-2890-0388
cris.virtualsource.departmentcafd0f9c-62ee-4fbc-b736-eb19e43687ce
cris.virtualsource.departmentab282d82-d986-4178-8007-1180517838a0
cris.virtualsource.department3303f61f-8f71-4733-bc6e-22f2714a9d67
cris.virtualsource.department046a4037-4001-4b14-a082-e7938355f1f1
cris.virtualsource.department9001e047-1419-49a0-b570-77d3b3d796f9
cris.virtualsource.department35854b77-4a46-44ca-a4d5-cde46856028b
cris.virtualsource.departmentceacc897-9287-45a3-a49c-2ae1210a4fd5
cris.virtualsource.departmentcd811942-aea0-4312-8eb5-d9cc179a6b3d
cris.virtualsource.department3130a19a-dfc3-4a7d-b95d-3a3bba263d29
cris.virtualsource.departmentee7e6e4c-3b87-41b4-9995-a519c69c638e
cris.virtualsource.departmentba46bc85-4f40-4d45-9ae9-787baa5405b9
cris.virtualsource.department8ae07241-6575-4a2b-b37a-30ec1307927a
cris.virtualsource.departmented894ec9-d595-4dd3-943b-8d99244a104d
cris.virtualsource.departmentbe708c5c-a9e8-4fce-ac31-bfe5c6d69ee1
cris.virtualsource.departmentde93b028-9708-4f3a-99f0-5edbf35f1ef2
cris.virtualsource.departmentbef86181-e7b5-46bf-97c5-eb6f2dc7c048
cris.virtualsource.department112e9a94-6aa4-4c28-96ec-777b0ea053f5
cris.virtualsource.department83f65a25-48f3-4301-bc68-696e60828f39
cris.virtualsource.department3bc579f6-9f8a-4782-ae0e-37d141d03a17
cris.virtualsource.department23ab4d34-06a5-49b7-a9f7-dc9611089503
cris.virtualsource.orcidcafd0f9c-62ee-4fbc-b736-eb19e43687ce
cris.virtualsource.orcidab282d82-d986-4178-8007-1180517838a0
cris.virtualsource.orcid3303f61f-8f71-4733-bc6e-22f2714a9d67
cris.virtualsource.orcid046a4037-4001-4b14-a082-e7938355f1f1
cris.virtualsource.orcid9001e047-1419-49a0-b570-77d3b3d796f9
cris.virtualsource.orcid35854b77-4a46-44ca-a4d5-cde46856028b
cris.virtualsource.orcidceacc897-9287-45a3-a49c-2ae1210a4fd5
cris.virtualsource.orcidcd811942-aea0-4312-8eb5-d9cc179a6b3d
cris.virtualsource.orcid3130a19a-dfc3-4a7d-b95d-3a3bba263d29
cris.virtualsource.orcidee7e6e4c-3b87-41b4-9995-a519c69c638e
cris.virtualsource.orcidba46bc85-4f40-4d45-9ae9-787baa5405b9
cris.virtualsource.orcid8ae07241-6575-4a2b-b37a-30ec1307927a
cris.virtualsource.orcided894ec9-d595-4dd3-943b-8d99244a104d
cris.virtualsource.orcidbe708c5c-a9e8-4fce-ac31-bfe5c6d69ee1
cris.virtualsource.orcidde93b028-9708-4f3a-99f0-5edbf35f1ef2
cris.virtualsource.orcidbef86181-e7b5-46bf-97c5-eb6f2dc7c048
cris.virtualsource.orcid112e9a94-6aa4-4c28-96ec-777b0ea053f5
cris.virtualsource.orcid83f65a25-48f3-4301-bc68-696e60828f39
cris.virtualsource.orcid3bc579f6-9f8a-4782-ae0e-37d141d03a17
cris.virtualsource.orcid23ab4d34-06a5-49b7-a9f7-dc9611089503
dc.contributor.authorMertens, Hans
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorOniki, Yusuke
dc.contributor.authorBriggs, Basoene
dc.contributor.authorChan, BT
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorHopf, Toby
dc.contributor.authorMannaert, Geert
dc.contributor.authorTao, Zheng
dc.contributor.authorSebaai, Farid
dc.contributor.authorPeter, Antony
dc.contributor.authorVandersmissen, Kevin
dc.contributor.authorDupuy, Emmanuel
dc.contributor.authorRosseel, Erik
dc.contributor.authorBatuk, Dmitry
dc.contributor.authorGeypen, Jef
dc.contributor.authorMartinez Alanis, Gerardo Tadeo
dc.contributor.authorAbigail, Daniel
dc.contributor.authorGrieten, Eva
dc.contributor.authorD'have, Koen
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorOniki, Yusuke
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorHopf, Toby
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorTao, Zheng
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorPeter, Antony
dc.contributor.imecauthorVandersmissen, Kevin
dc.contributor.imecauthorDupuy, Emmanuel
dc.contributor.imecauthorRosseel, Erik
dc.contributor.imecauthorBatuk, Dmitry
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorMartinez Alanis, Gerardo Tadeo
dc.contributor.imecauthorAbigail, Daniel_
dc.contributor.imecauthorGrieten, Eva
dc.contributor.imecauthorD'have, Koen
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecOniki, Yusuke::0000-0002-6619-1327
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecDupuy, Emmanuel::0000-0003-3341-1618
dc.contributor.orcidimecBatuk, Dmitry::0000-0002-6384-6690
dc.contributor.orcidimecMartinez Alanis, Gerardo Tadeo::0000-0001-5036-0491
dc.contributor.orcidimecGrieten, Eva::0000-0001-6328-7633
dc.contributor.orcidimecD'have, Koen::0000-0002-5195-9241
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecSubramanian, Sujith::0000-0001-8938-9750
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.accessioned2021-10-31T09:54:05Z
dc.date.available2021-10-31T09:54:05Z
dc.date.issued2021
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/36975
dc.identifier.urlhttps://ieeexplore.ieee.org/document/9508730
dc.source.conference2021 Symposium on VLSI Technology
dc.source.conferencedate13/06/2021
dc.source.conferencelocationKyoto Japan
dc.title

Forksheet FETs for Advanced CMOS Scaling: Forksheet-Nanosheet Co-Integration and Dual Work Function Metal Gates at 17nm N-P Space

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions