Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED
Publication:
Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED
Date
2005
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spessot, A.
;
Armigliato, A.
;
Balboni, R.
;
Frabboni, S.
;
Benedetti, Alessandro
Journal
Abstract
Description
Metrics
Views
1910
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1910
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations