Publication:
Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED
Date
| dc.contributor.author | Spessot, A. | |
| dc.contributor.author | Armigliato, A. | |
| dc.contributor.author | Balboni, R. | |
| dc.contributor.author | Frabboni, S. | |
| dc.contributor.author | Benedetti, Alessandro | |
| dc.date.accessioned | 2021-10-16T05:21:34Z | |
| dc.date.available | 2021-10-16T05:21:34Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11259 | |
| dc.source.beginpage | 157 | |
| dc.source.conference | Proceedings 7th Multinational Congress on Microscopy | |
| dc.source.conferencedate | 26/06/2005 | |
| dc.source.conferencelocation | Portoroz Slovenia | |
| dc.source.endpage | 158 | |
| dc.title | Analysis of depth-inhomogeneous strains in deep sub-micron silicon devices by TEM/CBED | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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