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Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics
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Correlation between grown-in silicon substrate defects and silicon gate oxide breakdown characteristics
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Date
1996
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vanhellemont, Jan
;
Kissinger, G.
;
Kenis, Karine
;
Depas, Michel
;
Gräf, D.
;
Lambert, U.
;
Wagner, P.
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1994
since deposited on 2021-09-29
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last month
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last week
Acq. date: 2026-01-25
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Statistics
Views
1994
since deposited on 2021-09-29
1
last month
1
last week
Acq. date: 2026-01-25
Citations