Publication:

Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping

Date

2008
Journal article
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cris.virtual.orcid0000-0003-3763-2098
cris.virtual.orcid0000-0002-9036-8241
cris.virtual.orcid0000-0003-1057-8140
cris.virtualsource.department2fcc3f32-b96b-4ece-a34c-e0dd87c237c9
cris.virtualsource.departmentb5b8437b-a909-4ee5-812e-0ce57bfdeaaf
cris.virtualsource.departmentee7e6e4c-3b87-41b4-9995-a519c69c638e
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dc.contributor.authorO'Connor, Robert
dc.contributor.authorChang, Vincent
dc.contributor.authorPantisano, Luigi
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorAoulaiche, Marc
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorGroeseneken, Guido
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.date.accessioned2021-10-17T09:24:08Z
dc.date.available2021-10-17T09:24:08Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14235
dc.identifier.urlhttp://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000093000005053506000001&idtype=cvips&prog=search
dc.source.beginpage53506
dc.source.issue5
dc.source.journalApplied Physics Letters
dc.source.volume93
dc.title

Anomalous positive-bias temperature instability of high-k/metal gate devices with Dy2O3 capping

dc.typeJournal article
dspace.entity.typePublication
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