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Articles
Enabling interconnect scaling with spacer-defined double patterning (SDDP)
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Enabling interconnect scaling with spacer-defined double patterning (SDDP)
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Date
2013
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Siew, Yong Kong
;
Stucchi, Michele
;
Versluijs, Janko
;
Roussel, Philippe
;
Kunnen, Eddy
;
Pantouvaki, Marianna
;
Beyer, Gerald
;
Tokei, Zsolt
Journal
Microelectronic Engineering
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1823
since deposited on 2021-10-21
1
last month
Acq. date: 2025-12-16
Citations