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Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash
Publication:
Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash
Date
2016-05
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Blomme, Pieter
;
Versluijs, Janko
;
Ercken, Monique
;
Souriau, Laurent
;
Hody, Hubert
;
Vecchio, Emma
;
Paraschiv, Vasile
;
Tan, Chi Lim
;
Van den Bosch, Geert
;
Van Houdt, Jan
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1973
since deposited on 2021-10-23
Acq. date: 2025-10-22
Citations
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Views
1973
since deposited on 2021-10-23
Acq. date: 2025-10-22
Citations