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Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash

Date

2016-05
Proceedings Paper
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dc.contributor.authorBlomme, Pieter
dc.contributor.authorVersluijs, Janko
dc.contributor.authorErcken, Monique
dc.contributor.authorSouriau, Laurent
dc.contributor.authorHody, Hubert
dc.contributor.authorVecchio, Emma
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorTan, Chi Lim
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorBlomme, Pieter
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorErcken, Monique
dc.contributor.imecauthorSouriau, Laurent
dc.contributor.imecauthorHody, Hubert
dc.contributor.imecauthorVecchio, Emma
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecSouriau, Laurent::0000-0002-5138-5938
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-23T10:08:13Z
dc.date.available2021-10-23T10:08:13Z
dc.date.issued2016-05
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26355
dc.source.beginpage113
dc.source.conferenceInternational Memory Workshop - IMW
dc.source.conferencedate15/05/2016
dc.source.conferencelocationParis France
dc.source.endpage116
dc.title

Junctionless array with ultrathin poly\TiN floating gate and HfAlO based intergate dielectric for sub-15nm planar NAND Flash

dc.typeProceedings paper
dspace.entity.typePublication
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