Publication:

Metrology for implanted Si substrate and dopant loss studies

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

18997.pdf 147.69 KB

Author(s)

Radisic, Dunja  
;
Shamiryan, Denis
;
Mannaert, Geert  
;
Boullart, Werner  
;
Rosseel, Erik  
;
Bogdanowicz, Janusz  
;
Goossens, Jozefien
;
Marrant, Koen
;
Bender, Hugo  

Journal

Abstract

Description

Statistics

Downloads

1 since deposited on 2021-10-18
Acq. date: 2026-02-24

Views

1901 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-24

Citations

Statistics

Downloads

1 since deposited on 2021-10-18
Acq. date: 2026-02-24

Views

1901 since deposited on 2021-10-18
1last month
Acq. date: 2026-02-24

Citations