Skip to content
Maintenance work will take place today between 6:00-6:30 PM. The service may be unavailable during this time. We apologize for any inconvenience.
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based Structures
Publication:
Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based Structures
Copy permalink
Date
2024
Journal article
https://doi.org/10.1109/jmems.2024.3447880
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
Accepted version
1.46 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Calderon Gonzalez, Maider
;
Cheyns, David
;
Ameloot, Rob
;
Genoe, Jan
Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Abstract
Description
Statistics
Downloads
451
since deposited on 2024-09-09
24
last month
8
last week
Acq. date: 2026-07-28
Views
303
since deposited on 2024-09-09
Acq. date: 2026-07-28
Citations
Statistics
Downloads
451
since deposited on 2024-09-09
24
last month
8
last week
Acq. date: 2026-07-28
Views
303
since deposited on 2024-09-09
Acq. date: 2026-07-28
Citations