Publication:

Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based Structures

Date

2024
Journal article
https://doi.org/10.1109/JMEMS.2024.3447880
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cris.virtual.orcid0000-0002-1327-8752
cris.virtual.orcid0000-0002-4019-5979
cris.virtual.orcid0000-0002-4750-2548
cris.virtualsource.departmente4a4fdaa-0da4-468f-9f11-ccd1e3699598
cris.virtualsource.department73187a2f-4799-45d3-9ae1-7cd599fe36b8
cris.virtualsource.department18924267-5bc2-4778-b162-11c203dcbfa9
cris.virtualsource.orcide4a4fdaa-0da4-468f-9f11-ccd1e3699598
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cris.virtualsource.orcid18924267-5bc2-4778-b162-11c203dcbfa9
dc.contributor.authorCalderon Gonzalez, Maider
dc.contributor.authorCheyns, David
dc.contributor.authorAmeloot, Rob
dc.contributor.authorGenoe, Jan
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorGenoe, Jan
dc.contributor.imecauthorCalderon Gonzalez, Maider
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.contributor.orcidimecGenoe, Jan::0000-0002-4019-5979
dc.contributor.orcidimecCalderon Gonzalez, Maider::0000-0002-4750-2548
dc.date.accessioned2025-04-07T11:56:09Z
dc.date.available2024-09-09T17:56:50Z
dc.date.available2025-04-07T11:56:09Z
dc.date.embargo2024-08-24
dc.date.issued2024
dc.description.wosFundingTextThis work was supported by the Research Foundation Flanders (FWO Vlaanderen) for funding in the research project under Grant G087422N.
dc.identifier.doi10.1109/JMEMS.2024.3447880
dc.identifier.issn1057-7157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44434
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage736
dc.source.endpage746
dc.source.issue6
dc.source.journalJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
dc.source.numberofpages11
dc.source.volume33
dc.subject.keywordsTEMPERATURE DISTRIBUTION
dc.subject.keywordsGAS SENSORS
dc.subject.keywordsOPTIMIZATION
dc.subject.keywordsDESIGN
dc.title

Integrated Sensors to Experimentally Measure Microheater Uniformity: Geometry Implications in Meander-Based Structures

dc.typeJournal article
dspace.entity.typePublication
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