Publication:

Measuring and Analyzing Contact Hole Variations in EUV Lithography

Date

2021

Proceedings Paper

https://doi.org/10.1117/12.2585308

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Author(s)

;

;

;

De Simone, Danilo

Journal

Proceedings of SPIE

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1858 since deposited on 2022-03-11

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Acq. date: 2026-09-23