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Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxides
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1931 since deposited on 2021-09-30
1last month
Acq. date: 2026-01-07
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Metrics
Views
1931 since deposited on 2021-09-30
1last month
Acq. date: 2026-01-07
Citations