Publication:
Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxides
Date
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Knotter, D. M. | |
| dc.contributor.author | Kenis, Karine | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Kenis, Karine | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-09-30T11:41:07Z | |
| dc.date.available | 2021-09-30T11:41:07Z | |
| dc.date.issued | 1998 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2489 | |
| dc.source.beginpage | 2589 | |
| dc.source.endpage | 2594 | |
| dc.source.issue | 7 | |
| dc.source.journal | J. Electrochem. Soc. | |
| dc.source.volume | 145 | |
| dc.title | Impact of iron contamination and roughness generated in ammonia hydrogen peroxide mixtures (SC1) on 5nm gate oxides | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |