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Stress simulations of Si- and Ge-channel FinFETs for the 14 nm-node and beyond

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1820 since deposited on 2021-10-21
1last month
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Acq. date: 2025-12-15

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1820 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2025-12-15

Citations