Publication:

Stress simulations of Si- and Ge-channel FinFETs for the 14 nm-node and beyond

Date

2013

Proceedings Paper

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Files

26631.pdf 334.58 KB

Author(s)

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Witters, Liesbeth

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Vincent, Benjamin

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Hikavyy, Andriy

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De Keersgieter, An

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Veloso, Anabela

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Richard, Olivier

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;

Vandervorst, Wilfried

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Horiguchi, Naoto

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Collaert, Nadine

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Statistics

1820 since deposited on 2021-10-21

Acq. date: 2026-02-24