Publication:

Atomic layer deposition of hafnium silicate from HfCl4, SiCl4, and H2O

Date

2007

Journal article

Simple item page Full metadata Statistics

Files

15707.pdf 175 KB

Author(s)

Fedorenko, Yanina

;

;

;

;

;

;

;

Delabie, Annelies

;

;

De Gendt, Stefan

Journal

Electrochemical and Solid-State Letters

Statistics

2022 since deposited on 2021-10-16

3last month

Acq. date: 2026-01-26