High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

Feutmba, GIlles F.; Da Silva, Leandro; Singh, Nishant; Breyne, Laurens; De Geest, Kobe; Puthenparampil George, John; Bauwelinck, Johan; Van Thourhout, Dries; Yin, Xin; Beeckman, Jeroen

doi:10.1364/ome.494148

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High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

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2023

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https://doi.org/10.1364/ome.494148

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Puthenparampil George, John

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OPTICAL MATERIALS EXPRESS

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High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

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