Publication:

High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

Date

2023
Journal article
https://doi.org/10.1364/OME.494148
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cris.virtual.orcid0000-0003-0609-1145
cris.virtual.orcid0000-0001-5254-2408
cris.virtual.orcid0000-0002-9672-6652
cris.virtual.orcid0000-0003-0111-431X
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dc.contributor.authorFeutmba, GIlles F.
dc.contributor.authorDa Silva, Leandro
dc.contributor.authorSingh, Nishant
dc.contributor.authorBreyne, Laurens
dc.contributor.authorDe Geest, Kobe
dc.contributor.authorPuthenparampil George, John
dc.contributor.authorBauwelinck, Johan
dc.contributor.authorVan Thourhout, Dries
dc.contributor.authorYin, Xin
dc.contributor.authorBeeckman, Jeroen
dc.contributor.imecauthorFeutmba, GIlles F.
dc.contributor.imecauthorDa Silva, Leandro
dc.contributor.imecauthorSingh, Nishant
dc.contributor.imecauthorBreyne, Laurens
dc.contributor.imecauthorDe Geest, Kobe
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.imecauthorYin, Xin
dc.contributor.orcidimecSingh, Nishant::0000-0003-0609-1145
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecYin, Xin::0000-0002-9672-6652
dc.contributor.orcidimecBreyne, Laurens::0000-0001-5367-0436
dc.date.accessioned2023-08-11T07:29:40Z
dc.date.available2023-08-05T17:01:15Z
dc.date.available2023-08-09T10:35:02Z
dc.date.available2023-08-11T07:29:40Z
dc.date.embargo9999-12-31
dc.date.issued2023
dc.description.wosFundingText. Fonds Wetenschappelijk Onderzoek (1S68218N)& nbsp;
dc.identifier.doi10.1364/OME.494148
dc.identifier.issn2159-3930
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42275
dc.publisherOptica Publishing Group
dc.source.beginpage2120
dc.source.endpage2134
dc.source.issue7
dc.source.journalOPTICAL MATERIALS EXPRESS
dc.source.numberofpages15
dc.source.volume13
dc.subject.keywordsSILICON
dc.title

High frequency characterization of PZT thin-films deposited by chemical solution deposition on SOI for integrated high speed electro-optic modulators

dc.typeJournal article
dspace.entity.typePublication
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