Publication:

OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures

Date

2022

Journal article

https://doi.org/10.1016/j.vacuum.2022.111182

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Author(s)

Franquet, Alexis

;

Spampinato, Valentina

;

;

Vandervorst, Wilfried

;

van der Heide, Paul

Journal

VACUUM

Metrics

1627 since deposited on 2022-06-17

2last month

Acq. date: 2025-12-16