Publication:
OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures
| dc.contributor.author | Franquet, Alexis | |
| dc.contributor.author | Spampinato, Valentina | |
| dc.contributor.author | Kayser, S. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | van der Heide, Paul | |
| dc.contributor.imecauthor | Franquet, Alexis | |
| dc.contributor.imecauthor | Spampinato, Valentina | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | van der Heide, Paul | |
| dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
| dc.contributor.orcidimec | Spampinato, Valentina::0000-0003-3225-6740 | |
| dc.contributor.orcidimec | van der Heide, Paul::0000-0001-6292-0329 | |
| dc.date.accessioned | 2022-09-01T14:05:06Z | |
| dc.date.available | 2022-06-17T02:26:47Z | |
| dc.date.available | 2022-09-01T14:05:06Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | The authors gratefully acknowledge Alexander Pirkl (IONTOF, Germany) for measurements and discussion, Roger Loo (imec, Belgium) and Bernardette Kunert (imec, Belgium) for sample preparation and discussion. This project has partly received funding from the ECSEL Joint Undertaking (JU) under grant agreement No 875999. The JU receives support from the European Union's Horizon 2020 research and innovation programme and Netherlands, Belgium, Germany, France, Austria, Hungary, United Kingdom, Romania, Israel. | |
| dc.identifier.doi | 10.1016/j.vacuum.2022.111182 | |
| dc.identifier.issn | 0042-207X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/39964 | |
| dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | |
| dc.source.beginpage | 111182 | |
| dc.source.issue | na | |
| dc.source.journal | VACUUM | |
| dc.source.numberofpages | 7 | |
| dc.source.volume | 202 | |
| dc.subject.keywords | SELF-FOCUSING SIMS | |
| dc.subject.keywords | MASS | |
| dc.title | OrbitrapTM-SIMS analysis of advanced semiconductor inorganic structures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |