Publication:
High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
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2004 since deposited on 2021-10-14
Acq. date: 2025-12-10
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Metrics
Views
2004 since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations