Publication:
High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
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2006 since deposited on 2021-10-14
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Acq. date: 2026-01-06
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2006 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-01-06
Citations