Publication:
High-speed 3D optical imaging and failure analysis of high- and low-frequency movements in micro-electro-mechanical (MEMS) with nanometer resolution
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2008 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-15
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Statistics
Views
2008 since deposited on 2021-10-14
1last month
Acq. date: 2026-05-15
Citations