Publication:

Scaling of Hf-based gate dielectrics - integration with polysilicon gates

Date

2003
Meeting abstract
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Author(s)

De Gendt, Stefan  
;
Caymax, Matty  
;
Chen, Jerry
;
Claes, Martine  
;
Conard, Thierry  
;
Delabie, Annelies  
;
Deweerd, Wim
;
Kaushik, Vidya
;
Kerber, Andreas
;
Kubicek, Stefan  
;
Niwa, Masaaki
;
Pantisano, Luigi
;
Puurunen, Riikka
;
Ragnarsson, Lars-Ake  
;
Schram, Tom  
;
Shimamoto, Yasuhiro
;
Tsai, Wilman
;
Röhr, Erika
;
Van Elshocht, Sven  
;
Witters, Thomas  
;
Young, Edward
;
Zhao, Chao
;
Heyns, Marc  

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2003 since deposited on 2021-10-15
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2003 since deposited on 2021-10-15
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Acq. date: 2026-01-25

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