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Integrated silicon photonic MEMS
Publication:
Integrated silicon photonic MEMS
Date
2023
Journal article
https://doi.org/10.1038/s41378-023-00498-z
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7.29 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Quack, Niels
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Edinger, Pierre
;
Jo, Gaehun
;
Bleiker, Simon J.
;
Errando-Herranz, Carlos
;
Gylfason, Kristinn B.
;
Niklaus, Frank
;
Khan, Muhammad Umar
;
Verheyen, Peter
;
Mallik, Arun Kumar
;
Lee, Jun Su
;
Jezzini, Moises
;
Morrissey, Padraic
;
Antony, Cleitus
;
O'Brien, Peter
;
Bogaerts, Wim
Journal
MICROSYSTEMS & NANOENGINEERING
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184
since deposited on 2023-04-14
Acq. date: 2025-10-24
Views
1237
since deposited on 2023-04-14
Acq. date: 2025-10-24
Citations
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Downloads
184
since deposited on 2023-04-14
Acq. date: 2025-10-24
Views
1237
since deposited on 2023-04-14
Acq. date: 2025-10-24
Citations