Publication:

Integrated silicon photonic MEMS

Date

2023
Journal article
https://doi.org/10.1038/s41378-023-00498-z
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Published version 7.29 MB

Author(s)

Quack, Niels
;
Takabayashi, Alain Yuji
;
Sattari, Hamed
;
Edinger, Pierre
;
Jo, Gaehun
;
Bleiker, Simon J.
;
Errando-Herranz, Carlos
;
Gylfason, Kristinn B.
;
Niklaus, Frank
;
Khan, Muhammad Umar  
;
Verheyen, Peter  
;
Mallik, Arun Kumar
;
Lee, Jun Su
;
Jezzini, Moises
;
Morrissey, Padraic
;
Antony, Cleitus
;
O'Brien, Peter
;
Bogaerts, Wim  

Journal

MICROSYSTEMS & NANOENGINEERING

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238 since deposited on 2023-04-14
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1243 since deposited on 2023-04-14
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