Integrated silicon photonic MEMS

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Published version 7.29 MB

Author(s)

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Takabayashi, Alain Yuji

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Edinger, Pierre

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Bleiker, Simon J.

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Errando-Herranz, Carlos

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Gylfason, Kristinn B.

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Khan, Muhammad Umar

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Verheyen, Peter

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Mallik, Arun Kumar

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Jezzini, Moises

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Morrissey, Padraic

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Antony, Cleitus

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Journal

MICROSYSTEMS & NANOENGINEERING

Metrics

184 since deposited on 2023-04-14

Acq. date: 2025-10-24

1237 since deposited on 2023-04-14

Acq. date: 2025-10-24