Publication:

Integrated silicon photonic MEMS

Date

2023
Journal article
https://doi.org/10.1038/s41378-023-00498-z
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dc.contributor.authorQuack, Niels
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorSattari, Hamed
dc.contributor.authorEdinger, Pierre
dc.contributor.authorJo, Gaehun
dc.contributor.authorBleiker, Simon J.
dc.contributor.authorErrando-Herranz, Carlos
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorNiklaus, Frank
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorVerheyen, Peter
dc.contributor.authorMallik, Arun Kumar
dc.contributor.authorLee, Jun Su
dc.contributor.authorJezzini, Moises
dc.contributor.authorMorrissey, Padraic
dc.contributor.authorAntony, Cleitus
dc.contributor.authorO'Brien, Peter
dc.contributor.authorBogaerts, Wim
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.date.accessioned2023-07-10T09:05:43Z
dc.date.available2023-04-14T03:56:42Z
dc.date.available2023-07-10T09:05:43Z
dc.date.embargo2023-03-20
dc.date.issued2023
dc.description.wosFundingTextThis work has been supported by the European Union through the H2020 project MORPHIC under grant 780283. N.Q. acknowledges funding by the Swiss National Science Foundation under grant 183717. The work reported in this manuscript was performed while N.Q. was at EPFL, and the manuscript was in part composed while N.Q. was at the University of Sydney. The authors acknowledge the support of the EPFL Center of MicroNanoTechnology (CMi).
dc.identifier.doi10.1038/s41378-023-00498-z
dc.identifier.issn2055-7434
dc.identifier.pmidMEDLINE:36949734
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41447
dc.publisherSPRINGERNATURE
dc.source.beginpageArt. 27
dc.source.endpagena
dc.source.issue1
dc.source.journalMICROSYSTEMS & NANOENGINEERING
dc.source.numberofpages22
dc.source.volume9
dc.subject.keywordsPHASE-SHIFTER
dc.subject.keywordsALUMINUM NITRIDE
dc.subject.keywordsPLATFORM
dc.subject.keywordsCOMPACT
dc.subject.keywordsTECHNOLOGY
dc.subject.keywordsRESONATOR
dc.subject.keywordsSWITCHES
dc.title

Integrated silicon photonic MEMS

dc.typeJournal article
dspace.entity.typePublication
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