Publication:
Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching
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Acq. date: 2026-09-14
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143 since deposited on 2024-05-02
19last month
6last week
Acq. date: 2026-09-14
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684 since deposited on 2024-05-02
Acq. date: 2026-09-14
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