Publication:
Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching
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Acq. date: 2025-12-15
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31 since deposited on 2024-05-02
11last month
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Acq. date: 2025-12-15
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676 since deposited on 2024-05-02
Acq. date: 2025-12-15
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