Publication:

Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching

Date

2024
Journal article
https://doi.org/10.1116/6.0003541
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Author(s)

Arvind, Shikhar  
;
Witting Larsen, Esben  
;
Bezard, Philippe  
;
Petersen, John  
;
De Gendt, Stefan  

Journal

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

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86 since deposited on 2024-05-02
Acq. date: 2026-06-24

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682 since deposited on 2024-05-02
Acq. date: 2026-06-24

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