Publication:
Impact of vacuum ultraviolet photons on ultrathin polymethylmethacrylate during plasma etching
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7 since deposited on 2024-05-02
Acq. date: 2025-10-23
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670 since deposited on 2024-05-02
Acq. date: 2025-10-23
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Downloads
7 since deposited on 2024-05-02
Acq. date: 2025-10-23
Views
670 since deposited on 2024-05-02
Acq. date: 2025-10-23
Citations