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Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
Publication:
Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration
Date
2002
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kerber, Andreas
;
Cartier, Eduard
;
Degraeve, Robin
;
Roussel, Philippe
;
Pantisano, Luigi
;
Kauerauf, Thomas
;
Groeseneken, Guido
;
De Gendt, Stefan
;
Heyns, Marc
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2023
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2023
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations