Publication:

Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

Date

2002
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dc.contributor.authorKerber, Andreas
dc.contributor.authorCartier, Eduard
dc.contributor.authorDegraeve, Robin
dc.contributor.authorRoussel, Philippe
dc.contributor.authorPantisano, Luigi
dc.contributor.authorKauerauf, Thomas
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-14T22:00:46Z
dc.date.available2021-10-14T22:00:46Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6471
dc.source.conferenceWorkshop on Dielectrics in Insulators - WODIM
dc.source.conferencedate18/11/2002
dc.source.conferencelocationGrenoble France
dc.title

Charge trapping and dielectric reliability in alternative gate dielectrics: a key challenge for integration

dc.typeOral presentation
dspace.entity.typePublication
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