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Nm-scale characterization of deep submicron devices using scanning probes
Publication:
Nm-scale characterization of deep submicron devices using scanning probes
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Date
2001
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandervorst, Wilfried
;
Duhayon, Natasja
;
Eyben, Pierre
;
Xu, Mingwei
;
Clarysse, Trudo
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1955
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations
Metrics
Views
1955
since deposited on 2021-10-14
Acq. date: 2025-12-11
Citations