Publication:
Nm-scale characterization of deep submicron devices using scanning probes
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Duhayon, Natasja | |
| dc.contributor.author | Eyben, Pierre | |
| dc.contributor.author | Xu, Mingwei | |
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Duhayon, Natasja | |
| dc.contributor.imecauthor | Eyben, Pierre | |
| dc.date.accessioned | 2021-10-14T18:12:57Z | |
| dc.date.available | 2021-10-14T18:12:57Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5781 | |
| dc.source.conference | Conference on Microscopy; 28 March 2001; Oxford, UK. | |
| dc.source.conferencelocation | ||
| dc.title | Nm-scale characterization of deep submicron devices using scanning probes | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |