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Integration challenges of copper Through Silicon Via (TSV) metallization for 3D-Stacked IC integration
Publication:
Integration challenges of copper Through Silicon Via (TSV) metallization for 3D-Stacked IC integration
Date
2010
Meeting abstract
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19885.pdf
410.53 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Olmen, Jan
;
Huyghebaert, Cedric
;
Coenen, Jens
;
Van Aelst, Joke
;
Sleeckx, Erik
;
Van Ammel, Annemie
;
Armini, Silvia
;
Vaes, Jan
;
Beyne, Eric
;
Travaly, Youssef
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1972
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1972
since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations