Publication:
Sub-50nm gate patterning using line-trimming with 248nm or 193nm litho
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1851 since deposited on 2021-10-14
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Acq. date: 2026-08-06
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Statistics
Views
1851 since deposited on 2021-10-14
2last month
2last week
Acq. date: 2026-08-06
Citations