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Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations
Publication:
Analysis of TDDB lifetime projection in low thermal budget HfO2/SiO2 stacks for sequential 3D integrations
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Date
2023
Proceedings Paper
https://doi.org/10.1109/IRPS48203.2023.10117955
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vici, Andrea
;
Degraeve, Robin
;
Roussel, Philippe
;
Franco, Jacopo
;
Kaczer, Ben
;
De Wolf, Ingrid
Journal
N/A
Abstract
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818
since deposited on 2023-07-15
1
last month
Acq. date: 2025-12-15
Citations
Metrics
Views
818
since deposited on 2023-07-15
1
last month
Acq. date: 2025-12-15
Citations