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The effect of plasma damage and different annealing ambients on the generation of latent interface states
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The effect of plasma damage and different annealing ambients on the generation of latent interface states
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Date
1998
Proceedings Paper
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2530.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Creusen, Martin
;
Lee, Hean-Cheal
;
Vanhaelemeersch, Serge
;
Groeseneken, Guido
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1892
since deposited on 2021-09-30
Acq. date: 2025-12-10
Citations
Metrics
Views
1892
since deposited on 2021-09-30
Acq. date: 2025-12-10
Citations