The effect of plasma damage and different annealing ambients on the generation of latent interface states

dc.contributor.author	Creusen, Martin
dc.contributor.author	Lee, Hean-Cheal
dc.contributor.author	Vanhaelemeersch, Serge
dc.contributor.author	Groeseneken, Guido
dc.contributor.imecauthor	Vanhaelemeersch, Serge
dc.contributor.imecauthor	Groeseneken, Guido
dc.contributor.orcidimec	Vanhaelemeersch, Serge::0000-0003-2102-7395
dc.date.accessioned	2021-09-30T11:37:02Z
dc.date.available	2021-09-30T11:37:02Z
dc.date.embargo	9999-12-31
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2465
dc.source.beginpage	217
dc.source.conference	Proceedings of the 3rd International Symposium on Plasma-Induced Damage - P2ID
dc.source.conferencedate	4/06/1998
dc.source.conferencelocation	Honolulu, HI USA
dc.source.endpage	220
dc.title	The effect of plasma damage and different annealing ambients on the generation of latent interface states
dc.type	Proceedings paper
dspace.entity.type	Publication
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