Publication:

Challenges with respect to high-k/metal gate stack etching and cleaning

Date

2007

Proceedings Paper

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Files

16072.pdf 500.95 KB

Author(s)

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Arnauts, Sophia

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Garaud, Sylvain

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Kubicek, Stefan

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Veloso, Anabela

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Conard, Thierry

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Leunissen, Peter

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Statistics

1985 since deposited on 2021-10-16

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Acq. date: 2026-01-25