Publication:

Resist reflow methodology development to investigate interfacial interactions

Date

2022
Journal article
https://doi.org/10.1117/1.JMM.21.4.044602
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Published version 1.74 MB

Author(s)

Severi, Joren  
;
Chan, Cinzia
;
De Simone, Danilo  
;
De Gendt, Stefan  

Journal

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3

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337 since deposited on 2023-03-01
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1391 since deposited on 2023-03-01
Acq. date: 2026-02-24

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