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Articles
Resist reflow methodology development to investigate interfacial interactions
Publication:
Resist reflow methodology development to investigate interfacial interactions
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Date
2022
Journal article
https://doi.org/10.1117/1.JMM.21.4.044602
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1.74 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Severi, Joren
;
Chan, Cinzia
;
De Simone, Danilo
;
De Gendt, Stefan
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
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286
since deposited on 2023-03-01
24
last month
5
last week
Acq. date: 2026-01-08
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1391
since deposited on 2023-03-01
1
last month
1
last week
Acq. date: 2026-01-08
Citations