Resist reflow methodology development to investigate interfacial interactions

dc.contributor.author	Severi, Joren
dc.contributor.author	Chan, Cinzia
dc.contributor.author	De Simone, Danilo
dc.contributor.author	De Gendt, Stefan
dc.contributor.imecauthor	Severi, Joren
dc.contributor.imecauthor	De Simone, Danilo
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.orcidimec	De Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2023-04-06T14:30:52Z
dc.date.available	2023-03-01T03:27:52Z
dc.date.available	2023-04-06T14:30:52Z
dc.date.issued	2022
dc.description.wosFundingText	Joren Severi is a Strategic Basic (SB) research PhD fellow at Fonds Wetenschappelijk Onderzoek (FWO) (Grant No. 1SA8919N).
dc.identifier.doi	10.1117/1.JMM.21.4.044602
dc.identifier.issn	1932-5150
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/41207
dc.publisher	SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
dc.source.beginpage	Art. 044602
dc.source.endpage	na
dc.source.issue	4
dc.source.journal	JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.numberofpages	12
dc.source.volume	21
dc.subject.keywords	SURFACE
dc.subject.keywords	FILMS
dc.title	Resist reflow methodology development to investigate interfacial interactions
dc.type	Journal article
dspace.entity.type	Publication
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